Hybrid simulations find O(3P) generation more energy-efficient than O(1D) in Ar/O2 capacitive discharges; costs fall with higher O2 fraction but rise with harmonic number N except for an inflection at N=2 with 10% O2 due to a shift into hybrid alpha-DA discharge mode.
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Hybrid simulation of the energy cost of O($^1$D) and O($^3$P) generation in a capacitive Ar/O$_2$ discharge driven by sawtooth-type voltage waveforms
Hybrid simulations find O(3P) generation more energy-efficient than O(1D) in Ar/O2 capacitive discharges; costs fall with higher O2 fraction but rise with harmonic number N except for an inflection at N=2 with 10% O2 due to a shift into hybrid alpha-DA discharge mode.