In argon capacitively coupled plasmas from 25 to 600 mTorr, ionization appears driven by electrons accelerated across the DC sheath at the powered electrode, with the RF field acting as an asymmetric perturbation; stochastic heating dominates at 5 mTorr.
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Investigation of high pressure capacitively coupled plasmas produced by electrons energized in DC sheath at powered electrode
In argon capacitively coupled plasmas from 25 to 600 mTorr, ionization appears driven by electrons accelerated across the DC sheath at the powered electrode, with the RF field acting as an asymmetric perturbation; stochastic heating dominates at 5 mTorr.