Thermal reconstruction of sapphire substrates via CO2 laser annealing enables growth of more crystalline TiN films for superconducting resonators without chemical cleaning, achieving similar device performance.
Sundgren, Structure and properties of TiN coatings, Thin Solid Films128, 21 (1985)
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Thermal reconstruction as a method of substrate preparation for highly crystalline superconducting TiN resonators
Thermal reconstruction of sapphire substrates via CO2 laser annealing enables growth of more crystalline TiN films for superconducting resonators without chemical cleaning, achieving similar device performance.