HSQ resist left on NbN coplanar waveguide resonators dominates their low-temperature microwave loss, with an inferred loss tangent of 8.0 x 10^-3.
High Kinetic Inductance NbN Nanowire Superinduc- tors,
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Geometric Scaling of Two-Level-System Loss in Superconducting Resonators
HSQ resist left on NbN coplanar waveguide resonators dominates their low-temperature microwave loss, with an inferred loss tangent of 8.0 x 10^-3.