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Challenge of crystalline IGZO ceramics to silicon LSI - Its application to AI and displays

Shunpei Yamazaki, "Challenge of crystalline IGZO ceramics to silicon LSI - Its application to AI, displays" in "Semiconductor Technology for Ultra Large Scale Integrated Circuits, Thin Film Transistors VII", ECI Symposium Series, ( · 2019

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cond-mat.mtrl-sci 1

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Sub-40mV Sigma-VTH IGZO nFETs in 300mm Fab

cond-mat.mtrl-sci · 2024-11-25 · conditional · novelty 6.0

Back-gated IGZO nFETs fabricated in a 300mm fab show threshold voltage variability as low as 20mV sigma, with a newly reported spinel IGZO phase.

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  • Sub-40mV Sigma-VTH IGZO nFETs in 300mm Fab cond-mat.mtrl-sci · 2024-11-25 · conditional · none · ref 2

    Back-gated IGZO nFETs fabricated in a 300mm fab show threshold voltage variability as low as 20mV sigma, with a newly reported spinel IGZO phase.