A kinetic Monte Carlo-style stochastic dynamics model for FEBID, parameterized by short molecular dynamics simulations, reproduces experimental growth rates and heights but only after selecting the parameter set that best matches those experiments.
With their use, P α 6 dif and P α 0 dif probabilities in Eqs.(6) and (8) can be set up
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Stochastic dynamics simulation of the focused electron beam induced deposition process
A kinetic Monte Carlo-style stochastic dynamics model for FEBID, parameterized by short molecular dynamics simulations, reproduces experimental growth rates and heights but only after selecting the parameter set that best matches those experiments.