Hydrogenated amorphous silicon parallel-plate resonators show two-level-system noise 5 to 80 times lower than previous amorphous dielectrics and comparable to crystalline substrates.
Esquinazi, ed., title Tunneling systems in amorphous and crystalline solids
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Low two-level-system noise in hydrogenated amorphous silicon
Hydrogenated amorphous silicon parallel-plate resonators show two-level-system noise 5 to 80 times lower than previous amorphous dielectrics and comparable to crystalline substrates.