MorphOPC proposes a multi-scale hierarchical neural model using morphological modules to generate optimized masks for optical proximity correction, outperforming prior generative methods on metal and via layer benchmarks.
InProceedings of the 39th International Conference on Computer-Aided Design
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MorphOPC: Advancing Mask Optimization with Multi-scale Hierarchical Morphological Learning
MorphOPC proposes a multi-scale hierarchical neural model using morphological modules to generate optimized masks for optical proximity correction, outperforming prior generative methods on metal and via layer benchmarks.