Proposes a six-layer SSbD architecture using Professional Proxies and hardware-isolated workflows to enable signed compliance reporting in industrial data spaces without exposing process recipes.
Virtual metrolog y in semiconductor manufacturing: Current status and future prospects,
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Trustworthy Smart Fabs via Professional Proxies: Scaling Safe and Sustainable by Design (SSbD) through Industrial Data Spaces
Proposes a six-layer SSbD architecture using Professional Proxies and hardware-isolated workflows to enable signed compliance reporting in industrial data spaces without exposing process recipes.