On the MIIC semiconductor SEM dataset, feature-based visual anomaly detection methods such as CFA and STFPM achieve strong image-level and pixel-level defect detection, but a reconstruction-based method from 2021 still reports the best image-level scores.
Towards improved semiconductor defect inspection for high-na euvl based on semi-superyolo-nas
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Evaluating Modern Visual Anomaly Detection Approaches in Semiconductor Manufacturing: A Comparative Study
On the MIIC semiconductor SEM dataset, feature-based visual anomaly detection methods such as CFA and STFPM achieve strong image-level and pixel-level defect detection, but a reconstruction-based method from 2021 still reports the best image-level scores.