Interfacial microstrain in alpha-Ta films on silicon correlates inversely with resonator internal quality factor, with lower strain linked to higher Q up to 1.5 million.
Crystallite size and microstrain: XRD line broadening analysis of AgSiN thin films,
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Interfacial Strain and Structural Defects Govern the Performance of Tantalum Superconducting Waveguide Resonators
Interfacial microstrain in alpha-Ta films on silicon correlates inversely with resonator internal quality factor, with lower strain linked to higher Q up to 1.5 million.