A zero-change foundry silicon photonics MEMS switch using the chip's existing metal layers as an actuator achieves >30 dB extinction, <1.5 dB insertion loss, and ~20 nW static power.
32×32 silicon electro-optic switch with built-in monitors and balanced- status units,
1 Pith paper cite this work. Polarity classification is still indexing.
1
Pith paper citing it
citation-role summary
background 1
citation-polarity summary
fields
physics.optics 1years
2026 1verdicts
CONDITIONAL 1roles
background 1polarities
background 1representative citing papers
citing papers explorer
-
Zero-change foundry compatible silicon photonics MEMS optical switch
A zero-change foundry silicon photonics MEMS switch using the chip's existing metal layers as an actuator achieves >30 dB extinction, <1.5 dB insertion loss, and ~20 nW static power.