A nanostructured silicon metagrating achieves broadband transmissive EUV diffraction with directionality up to 5.8 and phase-based operation from 25–50 eV, doubling the spectral window of prior metasurfaces.
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Transmissive extreme ultraviolet metagrating
A nanostructured silicon metagrating achieves broadband transmissive EUV diffraction with directionality up to 5.8 and phase-based operation from 25–50 eV, doubling the spectral window of prior metasurfaces.