Thermal reconstruction of sapphire substrates via CO2 laser annealing enables growth of more crystalline TiN films for superconducting resonators without chemical cleaning, achieving similar device performance.
Title resolution pending
1 Pith paper cite this work. Polarity classification is still indexing.
1
Pith paper citing it
fields
cond-mat.supr-con 1years
2026 1verdicts
UNVERDICTED 1representative citing papers
citing papers explorer
-
Thermal reconstruction as a method of substrate preparation for highly crystalline superconducting TiN resonators
Thermal reconstruction of sapphire substrates via CO2 laser annealing enables growth of more crystalline TiN films for superconducting resonators without chemical cleaning, achieving similar device performance.