A 16-micrometer NV-doped diamond membrane is fully etched through with a thin SiO2 mask and bonded to silica at room temperature via sodium silicate, with no detectable degradation of the embedded NV centers.
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Scalable Fabrication of Diamond-on-Silica Heterostructures via High-Selectivity Deep ICP-RIE and Room-Temperature Bonding
A 16-micrometer NV-doped diamond membrane is fully etched through with a thin SiO2 mask and bonded to silica at room temperature via sodium silicate, with no detectable degradation of the embedded NV centers.