SNMM method extended from single to multiple layers, reducing 3D EM problems in layered structures to series of 2D eigenvalue problems for metasurface and lithography simulations.
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2019 1verdicts
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Spectral Numerical Mode Matching Method for 3D Layered Multi-Region Structures
SNMM method extended from single to multiple layers, reducing 3D EM problems in layered structures to series of 2D eigenvalue problems for metasurface and lithography simulations.