A compact stereomicroscope built entirely from a single birefringent metalens resolves 435 nm features laterally and 1026 nm in depth, without conventional lenses.
Lens-free reflective topography for high-resolution wafer inspection,
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High resolution meta-stereomicroscope based on birefringent meta-optics
A compact stereomicroscope built entirely from a single birefringent metalens resolves 435 nm features laterally and 1026 nm in depth, without conventional lenses.