Micro-transfer printing achieves >95% yield and 420 nm placement accuracy for lithium niobate on 200 mm silicon photonics wafers, with modulators showing <2 dB loss and >70 GHz bandwidth.
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Micro-Transfer Printing of Lithium Niobate on 200 mm Silicon Photonics: A High-Speed Heterogeneous Wafer-Scale Platform
Micro-transfer printing achieves >95% yield and 420 nm placement accuracy for lithium niobate on 200 mm silicon photonics wafers, with modulators showing <2 dB loss and >70 GHz bandwidth.