Using diffraction from crystalline samples, the authors report a lower limit of 60% lateral coherence over 5% of the electron beam diameter in an SEM.
Herring, Electron beam coherence measurements using diffracted beam interferometry/holography
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Determining Electron Beam Lateral Coherence in a Scanning Electron Microscope Using Electron Diffraction
Using diffraction from crystalline samples, the authors report a lower limit of 60% lateral coherence over 5% of the electron beam diameter in an SEM.