Suspended thin-film lithium niobate resonators with platinum electrodes survive annealing at up to 550 °C, with frequency upshift and some quality-factor changes.
Design and Characterization of High-Q SAW Resonators Based on the AlN/Sapphire Structure Intended for High-Temperature Wireless Sensor Applications,
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Thermal Resilience of Suspended Thin-Film Lithium Niobate Acoustic Resonators up to 550 {\deg}C
Suspended thin-film lithium niobate resonators with platinum electrodes survive annealing at up to 550 °C, with frequency upshift and some quality-factor changes.