A bimorph lithium niobate PMUT reaches 775 kHz with Q of 200, 6.4% k2, 65 nm/V transmit efficiency, and stable performance to 600°C with survival to 900°C.
Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: Influence of intrinsic stress and sputtering parameters,
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Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers
A bimorph lithium niobate PMUT reaches 775 kHz with Q of 200, 6.4% k2, 65 nm/V transmit efficiency, and stable performance to 600°C with survival to 900°C.