A 2D PZT MEMS scanner made with a three-mask process reaches 11.5° and 4.8° optical scan angles at 54.2 kHz and 3.6 kHz, with reported Q factors of 1050 and 750.
Photonics Research, 2024
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2D PZT MEMS Resonant Scanner Using a Three-Mask Process
A 2D PZT MEMS scanner made with a three-mask process reaches 11.5° and 4.8° optical scan angles at 54.2 kHz and 3.6 kHz, with reported Q factors of 1050 and 750.