Hydrothermally-assisted sintering produces up to 98% dense Ca(OH)2 targets that enable (002)-oriented epitaxial CaO films on r-plane sapphire at a stable 1.2 nm/min rate.
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Hydrothermally-Assisted Sintering of Calcium Hydroxide Sputtering Targets: A Route to Quantum-Grade CaO Thin Films
Hydrothermally-assisted sintering produces up to 98% dense Ca(OH)2 targets that enable (002)-oriented epitaxial CaO films on r-plane sapphire at a stable 1.2 nm/min rate.