XPS evaluation of 17 capping layers identifies resilient options that limit niobium oxidation during standard fabrication and improve microwave resonator performance.
Gorham, NIST X-ray Photoelectron Spectroscopy Database - SRD 20 (2012)
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Fabrication effects on Niobium oxidation and surface contamination in Niobium-metal bilayers using X-ray photoelectron spectroscopy
XPS evaluation of 17 capping layers identifies resilient options that limit niobium oxidation during standard fabrication and improve microwave resonator performance.