Fabrication refinements—lateral-etch compensation, stepped Parylene-C AR coatings, and sub-micrometer epoxy bonds—bring PRIMA FIRESS Band 1 and Band 4 lenslet arrays to specification.
Compensated aspect ratio dependent etching (carde) using gray-scale technology,
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Optimization of lenslet arrays for PRIMA Kinetic Inductance Detectors
Fabrication refinements—lateral-etch compensation, stepped Parylene-C AR coatings, and sub-micrometer epoxy bonds—bring PRIMA FIRESS Band 1 and Band 4 lenslet arrays to specification.