A two-loop reverse-model method for test-time input optimization is claimed to find semiconductor etching recipes in five iterations, but the supporting evidence is simulation-only and not reproducible.
Human–machine collaboration for improving semiconductor process development.Nature, 616(7958):707–711, 2023
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Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond
A two-loop reverse-model method for test-time input optimization is claimed to find semiconductor etching recipes in five iterations, but the supporting evidence is simulation-only and not reproducible.