RF-sputtered SrTiO3 films on Pt(111)/Al2O3 achieve (111) texture with 0.2° rocking curve FWHM and ~110 pm RMS roughness when grown on low-power (90 W) Pt templates.
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Growth of (111)-textured SrTiO3 thin films on Pt(111)/Al2O3(1-102) substrates by rf magnetron sputter deposition
RF-sputtered SrTiO3 films on Pt(111)/Al2O3 achieve (111) texture with 0.2° rocking curve FWHM and ~110 pm RMS roughness when grown on low-power (90 W) Pt templates.