A variability-aware simulation workflow incorporating pilot-line data is used to demonstrate that wafer-scale heterogeneously integrated lithium niobate modulators on silicon photonics can be systematically engineered for stable performance.
A variability-aware simulation and design workflow for wafer-scale, heterogeneously integrated lithium niobate modulators
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abstract
We present a variability-aware simulation framework for heterogeneously integrated lithium niobate traveling-wave modulators. The framework incorporates fabrication-variation data obtained from our dedicated pilot line and enables efficient optimisation of geometric parameters to ensure stable device performance across wafer-scale manufacturing. Using this methodology, we theoretically demonstrate that reliable wafer-scale integration of LN modulators on silicon photonics via micro-transfer printing is feasible and can be systematically engineered.
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physics.optics 1years
2026 1verdicts
UNVERDICTED 1representative citing papers
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A variability-aware simulation and design workflow for wafer-scale, heterogeneously integrated lithium niobate modulators
A variability-aware simulation workflow incorporating pilot-line data is used to demonstrate that wafer-scale heterogeneously integrated lithium niobate modulators on silicon photonics can be systematically engineered for stable performance.