An open-source toolchain converts GDSII layout files into femtosecond-laser hole sequences, enabling crack-free fabrication of complex SiN trampoline resonators with Q up to 3.7e6 in under an hour.
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physics.optics 1years
2025 1verdicts
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Laser micromachining of arbitrarily complex and overhang-free SiN nanomechanical resonators
An open-source toolchain converts GDSII layout files into femtosecond-laser hole sequences, enabling crack-free fabrication of complex SiN trampoline resonators with Q up to 3.7e6 in under an hour.