A passive LC resonant pressure sensor on Rogers 4003C shows about 187 kHz/kPa sensitivity over 0 to 1.5 MPa, with a proposed spherical-conformal simulation model for membrane deformation.
A review of principles of MEMS pressure sensing with its aerospace applications
1 Pith paper cite this work. Polarity classification is still indexing.
1
Pith paper citing it
fields
physics.ins-det 1years
2024 1verdicts
CONDITIONAL 1representative citing papers
citing papers explorer
-
A wireless passive pressure sensor with high sensitivity
A passive LC resonant pressure sensor on Rogers 4003C shows about 187 kHz/kPa sensitivity over 0 to 1.5 MPa, with a proposed spherical-conformal simulation model for membrane deformation.