Alpha-Ta resonators on 300 mm high-resistivity Si wafers reach median internal Q factors exceeding 40 million with substrate loss tangent below 10^{-8}, using industrial processing.
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Ultra-high Q-factor superconducting tantalum resonators on 300 mm Si wafers
Alpha-Ta resonators on 300 mm high-resistivity Si wafers reach median internal Q factors exceeding 40 million with substrate loss tangent below 10^{-8}, using industrial processing.