Jointly tuning geometric and optical asymmetries in silicon nanoantennas enables Q factors up to 76,000 at wavelength-scale volumes and 10^6 at subwavelength volumes in free-space resonators.
Dolia et al., Very -large-scale-integrated high quality factor nanoantenna pixels, Nat
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$Q$ Factors Exceeding $10^{4}$ in Wavelength-to-Subwavelength-Scale Free-Space Resonators
Jointly tuning geometric and optical asymmetries in silicon nanoantennas enables Q factors up to 76,000 at wavelength-scale volumes and 10^6 at subwavelength volumes in free-space resonators.