A robust instrument setup for deep-UV tilted co-illumination with linear polarization control in SEM is developed to enhance secondary electron emission without metal coatings.
Guaita , author S
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2026 1verdicts
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UV-enhanced SEM: towards orientation and electron work function imaging
A robust instrument setup for deep-UV tilted co-illumination with linear polarization control in SEM is developed to enhance secondary electron emission without metal coatings.