Transfer learning with DinoV2 and pseudo-labeling achieves over 90% defect classification accuracy on semiconductor SEM images using fewer than 15 labeled images per class.
Deep learning-based detection, classification, and localization of defects in semiconductor processes
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Semiconductor SEM Image Defect Classification Using Supervised and Semi-Supervised Learning with Vision Transformers
Transfer learning with DinoV2 and pseudo-labeling achieves over 90% defect classification accuracy on semiconductor SEM images using fewer than 15 labeled images per class.