For tens-of-keV helium beams, uncertainty from the scattering potential in backscattering ion-beam analysis of thin films is below 3%, and smaller in transmission.
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On the influence of uncertainties in scattering potentials on quantitative analysis using keV ions
For tens-of-keV helium beams, uncertainty from the scattering potential in backscattering ion-beam analysis of thin films is below 3%, and smaller in transmission.