A CWT plus Siamese VGG-16 pipeline separates synthetically induced time-shift and amplitude-shift anomalies from normal semiconductor tool traces with reported 99-100% accuracy.
Nonlinear signal processing using neural networks: Prediction and system modelling, 6 1987
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Continuous Wavelet Transform and Siamese Network-Based Anomaly Detection in Multi-variate Semiconductor Process Time Series
A CWT plus Siamese VGG-16 pipeline separates synthetically induced time-shift and amplitude-shift anomalies from normal semiconductor tool traces with reported 99-100% accuracy.