For a nominal 52 μm production film, FFT thickness extraction is highly repeatable but biased by 0.62 μm versus WLI, while the zero-crossing LRZ method reduces the error to 0.20 μm.
Quinten, SN Appl
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Practical Evaluation of FFT-Based Thickness Extraction for Thick-Film Reflectometry
For a nominal 52 μm production film, FFT thickness extraction is highly repeatable but biased by 0.62 μm versus WLI, while the zero-crossing LRZ method reduces the error to 0.20 μm.