A differential strain-sensing interferometer on a rigid bulk-micromachined proof mass yields an optomechanical accelerometer with 4.2 µg/√Hz noise, 6.3 µg bias instability, and wide optical/thermal operating ranges, pointing toward deployable navigation-grade sensors.
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Towards Navigation-Grade and Deployable Optomechanical Accelerometry
A differential strain-sensing interferometer on a rigid bulk-micromachined proof mass yields an optomechanical accelerometer with 4.2 µg/√Hz noise, 6.3 µg bias instability, and wide optical/thermal operating ranges, pointing toward deployable navigation-grade sensors.