Femtosecond laser pulses modify black silicon at fluences around 4 mJ/cm2, far below the 0.2 J/cm2 ablation threshold of flat silicon, and Gauss-Bessel beams cut grooves with aspect ratio up to 8.
Nishijima , author R
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Ablation of black-Si by (Gauss-)Bessel femtosecond laser beams
Femtosecond laser pulses modify black silicon at fluences around 4 mJ/cm2, far below the 0.2 J/cm2 ablation threshold of flat silicon, and Gauss-Bessel beams cut grooves with aspect ratio up to 8.