Potential Loss Analysis attributes wafer defects to individual process steps by fitting a monotone value function whose increments serve as non-negative attribution scores, replacing the zeroed-out counterfactuals of partial trajectory regression.
Path Learning with Trajectory Advantage Regression
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In this paper, we propose trajectory advantage regression, a method of offline path learning and path attribution based on reinforcement learning. The proposed method can be used to solve path optimization problems while algorithmically only solving a regression problem.
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Cross-Process Defect Attribution using Potential Loss Analysis
Potential Loss Analysis attributes wafer defects to individual process steps by fitting a monotone value function whose increments serve as non-negative attribution scores, replacing the zeroed-out counterfactuals of partial trajectory regression.