Iterative differential deposition of WSi2 films corrected 300 mm silicon x-ray mirrors from several nm to as low as 0.1 nm RMS height error over 260 mm.
Ion beam figuring for X-ray mirrors: history, state-of-the-art and future prospects
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X-ray mirror figure correction using differential deposition
Iterative differential deposition of WSi2 films corrected 300 mm silicon x-ray mirrors from several nm to as low as 0.1 nm RMS height error over 260 mm.