Reflection ptychography requires samples 10-100 times thinner than transmission setups for the 2D approximation to remain accurate, with 3D modeling resolving thickness-dependent distortions.
Characterisation of Engineered Defects in Extreme Ul- traviolet Mirror Substrates Using Lab-Scale Extreme Ultraviolet Reflection Ptychography,
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The 2D approximation quickly breaks down in reflection ptychography
Reflection ptychography requires samples 10-100 times thinner than transmission setups for the 2D approximation to remain accurate, with 3D modeling resolving thickness-dependent distortions.