A mixture-of-experts transformer foundation model pretrained on diverse SEM images enables generalization across materials and outperforms SOTA on unsupervised defocus-to-focus restoration.
In: Photomask Technology 2025, vol
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A Mixture of Experts Foundation Model for Scanning Electron Microscopy Image Analysis
A mixture-of-experts transformer foundation model pretrained on diverse SEM images enables generalization across materials and outperforms SOTA on unsupervised defocus-to-focus restoration.