LithoDreamer is a world model framework that models computational lithography as a physics-informed multi-stage evolution process using contrastive variational optimization for forward simulation and inverse planning.
arXiv preprint arXiv:2510.21219 , year=
1 Pith paper cite this work. Polarity classification is still indexing.
1
Pith paper citing it
fields
cs.AI 1years
2026 1verdicts
UNVERDICTED 1representative citing papers
citing papers explorer
-
LithoDreamer: A Physics-Informed World Model for Multi-Stage Computational Lithography
LithoDreamer is a world model framework that models computational lithography as a physics-informed multi-stage evolution process using contrastive variational optimization for forward simulation and inverse planning.