A single static DOE produces dual-plane multi-spot arrays enabling simultaneous two-layer 2PP fabrication of woodpile structures at an effective speed of 1 mm² in 90 s.
Versatile stepper based maskless microlithog- raphy using a liquid crystal display for direct write of binary and multilevel microstructures
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Simultaneous Dual-Plane Multi-Write-Spot Two-Photon Polymerization Using a Single Diffractive Optical Element
A single static DOE produces dual-plane multi-spot arrays enabling simultaneous two-layer 2PP fabrication of woodpile structures at an effective speed of 1 mm² in 90 s.