PLD and ALD amorphous alumina microcantilevers exhibit bending plasticity with >10% strain at room temperature while sputtered films fail brittly; all show fracture toughness of 3.1 MPa m^{0.5} with no crack-tip plasticity.
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Microscale bending plasticity and fracture behavior of amorphous aluminum oxide films
PLD and ALD amorphous alumina microcantilevers exhibit bending plasticity with >10% strain at room temperature while sputtered films fail brittly; all show fracture toughness of 3.1 MPa m^{0.5} with no crack-tip plasticity.