Hydroxyls accumulate in the suboxide region of tantalum films and can be suppressed via chemical mechanical planarization or plasma nitridization, potentially reducing TLS defects in superconducting quantum circuits.
Oxidation kinetics of superconducting niobium and α-tantalum in atmosphere at short and intermediate time scales,
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Characterization of Hydroxyls in Surface Oxide of Superconducting Tantalum and Their Mitigation in Quantum Circuits
Hydroxyls accumulate in the suboxide region of tantalum films and can be suppressed via chemical mechanical planarization or plasma nitridization, potentially reducing TLS defects in superconducting quantum circuits.