MorphOPC proposes a multi-scale hierarchical neural model using morphological modules to generate optimized masks for optical proximity correction, outperforming prior generative methods on metal and via layer benchmarks.
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MorphOPC: Advancing Mask Optimization with Multi-scale Hierarchical Morphological Learning
MorphOPC proposes a multi-scale hierarchical neural model using morphological modules to generate optimized masks for optical proximity correction, outperforming prior generative methods on metal and via layer benchmarks.