A novel racetrack 3D-trench silicon sensor on 8-inch process achieves 50 ps time resolution, low leakage current below 0.2 nA, and full depletion at a few volts.
Silicon detectors with 3-D electrode arrays: fabrication and initial test results
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Design and Characterization of Racetrack 3D-Trench Silicon Sensor Based on 8-Inch Process with Excellent Time Resolution
A novel racetrack 3D-trench silicon sensor on 8-inch process achieves 50 ps time resolution, low leakage current below 0.2 nA, and full depletion at a few volts.