A 124 mm silicon vacuum window with sub-wavelength anti-reflection coating achieves 99% average transmittance and 1% reflectance over 67% fractional bandwidth with absorptive loss below detection limits.
Fabrication of three-layer silicon antireflection structures in 200–450 ghz using deep reactive ion etching
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Silicon-based vacuum window for millimeter and submillimeter-wave astrophysics
A 124 mm silicon vacuum window with sub-wavelength anti-reflection coating achieves 99% average transmittance and 1% reflectance over 67% fractional bandwidth with absorptive loss below detection limits.